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Journal Articles

Fabrication of p-type SiC using aluminum/carbon co-implantation

Oshima, Takeshi; Ito, Hisayoshi; Yoshikawa, Masahito

Dai-11-Kai Ryushisen No Sentanteki Oyo Gijutsu Ni Kansuru Shimpojiumu (BEAMS 2000) Hobunshu, p.139 - 142, 2000/11

no abstracts in English